低軸間耦合的MEMS三維電場傳感器

凌必赟; 彭春榮; 任仁; 儲昭志; 張洲威; 雷虎成; 夏善紅

doi:10.11999/JEIT171188

低軸間耦合的MEMS三維電場傳感器

doi: 10.11999/JEIT171188

凌必赟^{1, 2},
彭春榮¹,
任仁¹,
儲昭志^{1, 2},
張洲威^{1, 2},
雷虎成^{1, 2},
夏善紅^1, ,

1.
中國科學(xué)院電子學(xué)研究所傳感器技術(shù)國家重點(diǎn)實(shí)驗(yàn)室 ??北京 ??100190
2.
中國科學(xué)院大學(xué) ??北京 ??100049

基金項(xiàng)目: 國家自然科學(xué)基金(61327810)，國家863計(jì)劃項(xiàng)目(2015AA042602)，中國科學(xué)院創(chuàng)新面上基金(CXJJ-17-M151)

詳細(xì)信息

作者簡介:
凌必赟：男，1990年生，博士生，研究方向?yàn)镸EMS 3維電場傳感器

彭春榮：男，1979年生，博士，副研究員，研究方向?yàn)镸EMS電場傳感器及系統(tǒng)

任仁：男，1982年生，博士，副研究員，研究方向?yàn)镸EMS電場傳感器標(biāo)定和檢測系統(tǒng)

儲昭志：男，1990年生，博士生，研究方向?yàn)镸EMS電場傳感器及制備技術(shù)

張洲威：男，1993年生，博士生，研究方向?yàn)殪o電探測技術(shù)

雷虎成：男，1993年生，博士生，研究方向?yàn)楦哽`敏MEMS電場傳感器

夏善紅：女，1958年生，博士，研究員，研究方向?yàn)槲⒓{傳感器與微系統(tǒng)技術(shù)

通訊作者:
夏善紅 ? shxia@mail.ie.ac.cn

中圖分類號: TP212
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出版歷程
- 收稿日期: 2017-12-18
- 修回日期: 2018-05-07
- 網(wǎng)絡(luò)出版日期: 2018-06-12
- 刊出日期: 2018-08-01

MEMS-based Three-dimensional Electric Field Sensor with Low Cross-axis Coupling Interference

Biyun LING^{1, 2},
Chunrong PENG¹,
Ren REN¹,
Zhaozhi CHU^{1, 2},
Zhouwei ZHANG^{1, 2},
Hucheng LEI^{1, 2},
Shanhong XIA^{1
, ,}

1.
State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China
2.
University of Chinese Academy of Sciences, Beijing 100049, China

Funds: The National Natural Science Foundation of China (61327810), The National 863 Program of China (2015AA042602), Chinese Academy of Sciences Project (CXJJ-17-M151)

摘要

摘要: 軸間耦合干擾是影響3維電場傳感器測量準(zhǔn)確性的重要因素。該文提出了一種低耦合干擾的MEMS 1維電場敏感芯片，并將3個(gè)上述的芯片正交組合研制出一款低軸間耦合的MEMS 3維電場傳感器。不同于已見報(bào)道的測量垂直方向電場分量的MEMS 1維電場敏感芯片，該文提出的芯片采用軸對稱設(shè)計(jì)，在差分電路的配合下能夠測量垂直于對稱軸方向的面內(nèi)電場分量，并能夠消除正交于測量軸方向的電場分量的耦合干擾。該MEMS 3維電場傳感器具尺寸小和集成度高等優(yōu)點(diǎn)。實(shí)驗(yàn)結(jié)果表明在0～120 kV/m電場強(qiáng)度范圍內(nèi)，該MEMS 3維電場傳感器的軸間耦合靈敏度小于3.48%，3維電場測量誤差小于7.13%。
- MEMS /
- 3維 /
- 電場傳感器 /
- 軸間耦合干擾
Abstract: Cross-axis coupling interference influences greatly the measurement accuracy of Three-Dimensional (3D) Electric Field Sensor (EFS). A MEMS-based One-Dimensional (1D) Electric Field Microsensor (EFM) chip with low coupling interference is presented, and a MEMS-based 3D EFS with low cross-axis coupling interference is developed by arranging three 1D EFM chips orthogonally. Different from previously reported 1D EFM chips sensitive to perpendicular electric field component, the proposed 1D EFM chip is designed to be symmetrical and connected to difference circuit, so that it is capable of sensing parallel electric field component perpendicular to axis of symmetry and eliminating coupling interference. The proposed 3D EFS has the advantages of small size and high integration. Experimental results reveal that in the range of 0～120 kV/m, the cross-axis sensitivities are within 3.48%, and the total measurement errors of this 3D EFS are within 7.13%.
- Micro-Electro-Mechanical System (MEMS) /
- Three-dimensional /
- Electric field sensor /
- Cross-axis coupling interference

HTML全文

圖 1 1 維電場敏感芯片示意圖

下載: 全尺寸圖片幻燈片

圖 2 1 維電場敏感芯片的仿真模型

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圖 3 1 維電場敏感芯片對不同方向電場的仿真結(jié)果

下載: 全尺寸圖片幻燈片

圖 4 1 維電場敏感芯片的微加工工藝流程

下載: 全尺寸圖片幻燈片

圖 5 1 維電場敏感芯片掃描電鏡照片

下載: 全尺寸圖片幻燈片

圖 6 MEMS 3 維電場傳感器的實(shí)物圖

下載: 全尺寸圖片幻燈片

圖 7 MEMS 3 維電場傳感器測試標(biāo)定裝置

下載: 全尺寸圖片幻燈片

圖 8 MEMS 3維電場傳感器的標(biāo)定曲線

下載: 全尺寸圖片幻燈片

表 1 1 維電場敏感芯片的關(guān)鍵參數(shù)

結(jié)構(gòu)參數(shù)	參數(shù)值
感應(yīng)電極寬度w_sn	8 μm
屏蔽電極寬度w_sh	10 μm
感應(yīng)電極與屏蔽電極的間距(平衡位置)g	15 μm
相鄰的兩個(gè)感應(yīng)電極的間距W	95 μm
感應(yīng)電極長度L_sn	1030 μm
屏蔽電極長度L_sh	1045 μm
結(jié)構(gòu)厚度 $\tau $	25 μm
襯底厚度h	300 μm
感應(yīng)電極數(shù)量N_e	14×2
梳齒數(shù)量N_d	84×20
諧振結(jié)構(gòu)質(zhì)量m_eff	4.4×10^–5 g
等效彈性系數(shù)k_q	11.3 N/m

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表 2 X軸，Y軸和Z軸1維電場敏感芯片的靈敏度

電場方向	X軸1維電場敏感芯片的靈敏度 (mV·m/kV)	Y軸1維電場敏感芯片的靈敏度 (mV·m/kV)	Z軸1維電場敏感芯片的靈敏度 (mV·m/kV)
沿X軸	0.293	0.001	0.008
沿Y軸	0.011	0.316	0.007
沿Z軸	0.008	0	0.287

下載: 導(dǎo)出CSV

表 3 3 維電場傳感器在空間作不同角旋轉(zhuǎn)的輸出與計(jì)算電場

旋轉(zhuǎn)角度	施加電場(kV/m)	X軸1維電場敏感芯片的輸出(mV)	Y軸1維電場敏感芯片的輸出(mV)	Z軸1維電場敏感芯片的輸出(mV)	合成電場(kV/m)	誤差(%)
$\theta $₁	50	0.01	8.67	12.08	49.77	0.46
$\theta $₁	100	0.01	17.51	24.35	100.40	0.40
$\theta $₂	50	0.01	13.97	6.86	49.84	0.32
$\theta $₂	100	0.04	27.74	13.99	99.56	0.44
$\theta $₃	50	0.03	–10.08	–11.63	51.08	2.16
$\theta $₃	100	0.05	–20.50	–22.84	101.67	1.67
$\theta $₄	50	2.56	–13.02	8.57	52.21	4.42
$\theta $₄	100	5.22	–26.73	15.99	104.02	4.02
$\theta $₅	50	–8.67	9.77	8.49	53.30	6.60
$\theta $₅	100	–16.94	19.32	17.84	107.13	7.13

下載: 導(dǎo)出CSV

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