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分布式MEMS移相器橋高度與相移量的機電集成模型及應用

王從思 殷蕾 李飛 應康 張軼群 王猛

王從思, 殷蕾, 李飛, 應康, 張軼群, 王猛. 分布式MEMS移相器橋高度與相移量的機電集成模型及應用[J]. 電子與信息學報, 2018, 40(6): 1484-1491. doi: 10.11999/JEIT170762
引用本文: 王從思, 殷蕾, 李飛, 應康, 張軼群, 王猛. 分布式MEMS移相器橋高度與相移量的機電集成模型及應用[J]. 電子與信息學報, 2018, 40(6): 1484-1491. doi: 10.11999/JEIT170762
WANG Congsi, YIN Lei, LI Fei, YING Kang, ZHANG Yiqun, WANG Meng. Integrated Electromechanical Model and Applications of Bridge Height and Phase Shift in Distributed MEMS Phase Shifter[J]. Journal of Electronics & Information Technology, 2018, 40(6): 1484-1491. doi: 10.11999/JEIT170762
Citation: WANG Congsi, YIN Lei, LI Fei, YING Kang, ZHANG Yiqun, WANG Meng. Integrated Electromechanical Model and Applications of Bridge Height and Phase Shift in Distributed MEMS Phase Shifter[J]. Journal of Electronics & Information Technology, 2018, 40(6): 1484-1491. doi: 10.11999/JEIT170762

分布式MEMS移相器橋高度與相移量的機電集成模型及應用

doi: 10.11999/JEIT170762
基金項目: 

國家自然科學基金(51522507, 51475349, 51490660),國家973計劃項目(2015CB857100),陜西省青年科技新星計劃(2016KJXX-06),中央高?;究蒲袠I(yè)務費專項資金(JBG150409, KJXX1603, 7214479606)

Integrated Electromechanical Model and Applications of Bridge Height and Phase Shift in Distributed MEMS Phase Shifter

Funds: 

The National Natural Science Foundation of China (51522507, 51475349, 51490660), The National 973 Plan of China (2015CB857100), Shaanxi Province Youth Science and Technology New Star Program (2016KJXX-06), The Special Funds for Basic Scientific Research Services in Central Colleges and Universities (JBG150409, KJXX1603, 7214479606)

  • 摘要: 移相器是控制相控陣天線空間波束捷變的方向盤,其性能的優(yōu)良決定著相控陣天線性能的高低。微機電系統(tǒng)(MEMS)移相器優(yōu)勢明顯,但由于相控陣天線工作環(huán)境復雜,環(huán)境載荷會導致MEMS移相器結構變形,進而直接降低整個相控陣天線的性能。為此,該文研究MEMS移相器關鍵結構參數(shù)和電性能之間的耦合關系,將復雜環(huán)境要素對物理結構的影響傳遞到結構參數(shù)和電參數(shù)上,推導出分布式MEMS移相器的機電集成模型,并利用集成模型對變形MEMS移相器進行電性能快速評估和結構公差計算。仿真結果說明了集成模型的有效性和工程應用價值。
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出版歷程
  • 收稿日期:  2017-07-24
  • 修回日期:  2018-01-22
  • 刊出日期:  2018-06-19

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