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分布式MEMS移相器橋高度與相移量的機電集成模型及應用

王從思,  殷蕾,  李飛,  應康,  張軼群,  王猛

王從思, 殷蕾, 李飛, 應康, 張軼群, 王猛. 分布式MEMS移相器橋高度與相移量的機電集成模型及應用[J]. 電子與信息學報, 2018, 40(6): 1484-1491. doi: 10.11999/JEIT170762
引用本文: 王從思, 殷蕾, 李飛, 應康, 張軼群, 王猛. 分布式MEMS移相器橋高度與相移量的機電集成模型及應用[J]. 電子與信息學報, 2018, 40(6): 1484-1491. doi: 10.11999/JEIT170762
WANG Congsi, YIN Lei, LI Fei, YING Kang, ZHANG Yiqun, WANG Meng. Integrated Electromechanical Model and Applications of Bridge Height and Phase Shift in Distributed MEMS Phase Shifter[J]. Journal of Electronics & Information Technology, 2018, 40(6): 1484-1491. doi: 10.11999/JEIT170762
Citation: WANG Congsi, YIN Lei, LI Fei, YING Kang, ZHANG Yiqun, WANG Meng. Integrated Electromechanical Model and Applications of Bridge Height and Phase Shift in Distributed MEMS Phase Shifter[J]. Journal of Electronics & Information Technology, 2018, 40(6): 1484-1491. doi: 10.11999/JEIT170762

分布式MEMS移相器橋高度與相移量的機電集成模型及應用

doi: 10.11999/JEIT170762
  • 1.

    (西安電子科技大學電子裝備結構設計教育部重點實驗室 西安 710071) ②(西安華為技術有限公司 西安 710075) ③(南京電子技術研究所 南京 210039) ④(陜西黃河集團有限公司 西安 710043)

基金項目: 

國家自然科學基金(51522507, 51475349, 51490660)，國家973計劃項目(2015CB857100)，陜西省青年科技新星計劃(2016KJXX-06)，中央高?；究蒲袠I(yè)務費專項資金(JBG150409, KJXX1603, 7214479606)

Integrated Electromechanical Model and Applications of Bridge Height and Phase Shift in Distributed MEMS Phase Shifter

  • 1.

    (Key Laboratory of Electronic Equipment Structure Design, Ministry of Education, Xidian University, Xi&rsquo

  • 2.

    (Xi&rsquo

Funds: 

The National Natural Science Foundation of China (51522507, 51475349, 51490660), The National 973 Plan of China (2015CB857100), Shaanxi Province Youth Science and Technology New Star Program (2016KJXX-06), The Special Funds for Basic Scientific Research Services in Central Colleges and Universities (JBG150409, KJXX1603, 7214479606)

  • 摘要: 移相器是控制相控陣天線空間波束捷變的方向盤，其性能的優(yōu)良決定著相控陣天線性能的高低。微機電系統(tǒng)(MEMS)移相器優(yōu)勢明顯，但由于相控陣天線工作環(huán)境復雜，環(huán)境載荷會導致MEMS移相器結構變形，進而直接降低整個相控陣天線的性能。為此，該文研究MEMS移相器關鍵結構參數(shù)和電性能之間的耦合關系，將復雜環(huán)境要素對物理結構的影響傳遞到結構參數(shù)和電參數(shù)上，推導出分布式MEMS移相器的機電集成模型，并利用集成模型對變形MEMS移相器進行電性能快速評估和結構公差計算。仿真結果說明了集成模型的有效性和工程應用價值。
    Abstract: Phase shifter is the steering wheel to control the beam direction of Phased Array Antenna (PAA), which determines the performance of the PAA. Micro Electronic Mechanical System (MEMS) phase shifter has obvious advantages for PAA, but there always exists structural deformation caused by the complex work environment and environmental load of the PAA, which has serious impact over the performance of the PAA. Therefore, the coupling between the key structural parameters of MEMS phase shifter and the electrical parameters is studied by transmitting the influence of complex environmental factors on structure of MEMS to the structural and electrical parameters. The electromechanical integrated model of distributed MEMS phase shifter is derived. Besides, the rapid performance assessment and structural tolerance of the deformed MEMS phase shifter is calculated based on the coupled model. The simulation results show the effectiveness of the coupled model and the engineering application value.
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出版歷程
  • 收稿日期:  2017-07-24
  • 修回日期:  2018-01-22
  • 刊出日期:  2018-06-19

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