基于二極管單元的高密度掩模ROM設(shè)計
doi: 10.11999/JEIT160938
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1.
(中國科學(xué)院上海微系統(tǒng)與信息技術(shù)研究所 上海 200050) ②(上海新儲集成電路有限公司 上海 200122)
中國科學(xué)院戰(zhàn)略性先導(dǎo)科技專項(XDA09020402),國家重點基礎(chǔ)研究發(fā)展計劃(2013CBA01904, 2013CBA01900, 2010CB 934300, 2011CBA00607, 2011CB932804),國家集成電路重大專項(2009ZX02023-003),國家自然科學(xué)基金(61076121, 61176122, 61106001, 61261160500, 61376006)
Design of High-density Mask ROM Based on Diode Cells
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1.
(Shanghai Institute of Microsystem And Information Technology, Chinese Academy of Sciences, Shanghai 200050, China)
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2.
(Shanghai Xinchu Integrated Circuit Incorporation, Shanghai 200122, China)
Strategic Priority Research Program of the Chinese Academy of Sciences (XDA09020402), The National Key Basic Research Program of China (2013CBA01904, 2013CBA01900, 2010CB934300, 2011CBA00607, 2011CB932804), The National Integrate Circuit Research Program of China (2009ZX02023-003), The National Natural Science Foundation of China (61076121, 61176122, 61106001, 61261160500, 61376006)
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摘要: 針對傳統(tǒng)ROM(Read-Only Memory)存儲密度低、功耗高的問題,該文提出一種采用二極管單元并通過接觸孔編程來存儲數(shù)據(jù)的掩模ROM。二極管陣列采用雙溝槽隔離工藝和無間隙接觸孔連接方式實現(xiàn)了極高的存儲密度。基于此設(shè)計了一款容量為2 Mb的掩模ROM,包含8個256 kb的子陣列。二極管陣列采用40 nm設(shè)計規(guī)則,外圍邏輯電路采用2.5 V CMOS工藝完成設(shè)計。二極管單元的有效面積僅為0.017m2,存儲密度高達(dá)0.0268 mm2/Mb。測試結(jié)果顯示二極管單元具備良好的單元特性,在2.5 V電壓下2 Mb ROM的比特良率達(dá)到了99.8%。Abstract: Since the traditional Read-Only Memory (ROM) has the problems of low density and high power consumption, a mask ROM based on diode cells and contact-programming process is proposed. With dual-trench isolation process and borderless contact scheme, the diode array can realize ultrahigh density. Based on the proposed novel diode array, a mask ROM macro with 2 Mb capacity is designed, which contains 8 256 kb sub-arrays. The diode arrays are fabricated with 40 nm design rule and the peripheral logic circuits are achieved in 2.5 V CMOS process. The effective area of the diode cell is only 0.017 m2 and the density of the diode array is 0.0268 mm2/Mb. Test results show that the cell feature of diodes is good and the bit yield of the 2 Mb ROM achieves 99.8% under 2.5 V supply voltage.
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Key words:
- Mask Read-Only Memory (ROM) /
- Diode array /
- High-density /
- Low power /
- Dual-trench isolation process
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