一種電極型MEMS電場傳感器封裝結(jié)構(gòu)
doi: 10.11999/JEIT160608
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1.
(清華大學(xué)微電子學(xué)研究所 北京 100084) ②(中國科學(xué)院電子學(xué)研究所傳感技術(shù)聯(lián)合國家重點(diǎn)實(shí)驗(yàn)室 北京 100190)
基金項(xiàng)目:
國家自然科學(xué)基金(61302032, 61327810, 61201078)
Electrode Package for Electric Field Micro Sensor
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1.
(Institute of Microelectronics, Tsinghua University, Beijing 100084, China)
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2.
(State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China)
Funds:
The National Natural Science Foundation of China (61302032, 61327810, 61201078)
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摘要: 為了提高M(jìn)EMS電場傳感器敏感芯片封裝的環(huán)境適應(yīng)性，該文提出一種新型的電極型MEMS電場傳感器封裝結(jié)構(gòu)。區(qū)別于將傳感器敏感芯片及探頭放置于被測環(huán)境中，該文通過在MEMS電場傳感器封裝管殼外部增加封裝電極，僅將封裝電極暴露在被測環(huán)境中，有效避免了傳感器敏感芯片封裝管殼受到多種惡劣環(huán)境的干擾。研制出基于新型封裝結(jié)構(gòu)的MEMS地面電場傳感器及探空電場傳感器，仿真及試驗(yàn)結(jié)果表明，該結(jié)構(gòu)傳感器能夠?qū)崿F(xiàn)對電場高精度準(zhǔn)確測量，在高濕、低溫等惡劣環(huán)境下輸出穩(wěn)定可靠。
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關(guān)鍵詞:
- 電場傳感器 /
- 微機(jī)械電子系統(tǒng) /
- 封裝 /
- 環(huán)境適應(yīng)性 /
- 大氣電場探測
Abstract: To improve the environmental adaptation of the package of electric field micro sensor, this article introducs a new electrode package. Different from placing the sensing chip and package inside the measured environment, a package electrode, which is the only part exposed outside, is invented. In this way, the package shell is effectively protected from various environmental extremes. Based on this structure, new atmospheric electric field micro sensors are introduced on the ground and for sounding. The FEM and experiments show that the new sensors measure electric field accurately and stably under high humidity and low temperature environment. -
YANG Pengfei, CHEN Bo, WEN Xiaolong, et al. A novel MEMS chip-based atmospheric electric field sensor for lightning hazard warning applications[C]. IEEE Sensors, Busan, 2015: 978-981. doi: 10.1109/ICSENS.2015.7370268. SCHUMANN C, SABA M M F, SILVA R B G, et al. Electric fields changes produced by positives cloud-to-ground lightning flashes[J]. Journal of Atmospheric and Solar- Terrestrial Physics, 2013, 92: 37-42. doi: 10.1016/j.jastp.2012. 09.008. SABA M M F, SCHUMANN C, WARNER T A, et al. High-speed video and electric field observation of a negative upward leader connecting a downward positive leader in a positive cloud-to-ground flash[J]. Electric Power Systems Research, 2015, 118(SI): 89-92. doi: 10.1016/j.epsr.2014.06. 002. JIANG Z, JIA S, HUO L, et al. An integrated three- dimensional sensor for the electric field changes produced by lightning discharges[C]. Environmental Electromagnetics (CEEM), 7th Asia-Pacific Conference, Hangzhou, 2015: 432-435. doi: 10.1109/CEEM.2015.7368617. ROZGA P. Streamer propagation in a non-uniform electric field under lightning impulse in short gaps insulated with natural ester and mineral oil[J]. Bulletin of the Polish Academy of Sciences Technical Sciences, 2016, 64(1): 171-179. ARIZA D, ROMAN F, MONTERO O, et al. Behavior of corona current and atmospheric variables under thunderstorm conditions: Thunderstorm prediction algorithm[C]. 2012 International Conference on Lightning Protection (ICLP), Vienna, Austria, 2012: 1-5. doi: 10.1109/ ICLP.2012.6344379. WILSON C T R. The electric field of a thundercloud and some of its effects[C]. Proceedings of the Physical Society, London, 37(1924) 32D. doi: 10.1088/1478-7814/37/1/314. FERRO M A S, YAMASAKI J, PIMENTEL D R M, et al. Lightning risk warnings based on atmospheric electric field measurements in Brazil[J]. Journal of Aerospace Technology and Management, 2011, 3(3): 301-310. 羅福山, 莊洪春, 等. 球載雙球式電場儀及其應(yīng)用[J]. 地球物理學(xué)報(bào), 1999, 42(6): 772-777. LUO Fushan, ZHUANG Hongchun, et al. Balloon-borne two shpheres electric field instrument and application[J]. Chinese Journal of Geophysics, 1999, 42(6): 772-777. MARUVADA P S. Electric field and ion current environment of HVdc transmission lines: comparison of calculations and measurements[J]. IEEE Transactions on Power Delivery, 2012, 27(1): 401-410. doi: 10.1109/TPWRD.2011.2172003. LIAO J, PENG Z, ZHANG L, et al. Electric field distribution on four-bundle conductors in 750 kV AC substation[C]. IEEE 10th International Conference on Properties and Applications of Dielectric Materials (ICPADM2012), Bangalore, India, 2012: 1-4. doi: 10.1109/ ICPADM.2012.6318942. YANG Pengfei, PENG Chunrong, ZHANG Haiyan, et al. A high sensitivity SOI electric-field sensor with novel comb- shaped microelectrodes[C]. 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers11), Beijing, China, 2011: 1034-1037. doi: 10.1109/TRANSDUCERS.2011.5969165. WANG Y, FANG D, FENG K, et al. A novel micro electric field sensor with X-Y, dual axis sensitive differential structure [J]. Sensors Actuators A Physical, 2015, 229: 1-7. doi: 10.1016/j.sna.2015.03.013. HORENSTEIN M N and STONE P R. A micro-aperture electrostatic field mill based on MEMS technology[J]. Journal of Electrostatics, 2001, 5152(5): 515-521. doi: 10.1016/ S0304-3886(01)00048-1. RIEHL P S, SCOTT K L, MULLER R S, et al. Electrostatic charge and field sensors based on micromechanical resonators [J]. Journal of Microelectromechanical Systems, 2003, 12(5): 577-589. doi: 10.1109/JMEMS.2003.818066. KOBAYASHI T, OYAMA S, TAKAHASHI M, et al. Microelectromechanical systems-based electrostatic field sensor using Pb(Zr,Ti)O3 thin films[J]. Japanese Journal of Applied Physics, 2008, 47(9): 7533-7536. doi: 10.1143/JJAP. 47.7533. -
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