一種基于MEMS芯片的新型地面大氣電場(chǎng)傳感器
doi: 10.11999/JEIT150994
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1.
(北京大學(xué)微米/納米加工技術(shù)國(guó)家重點(diǎn)實(shí)驗(yàn)室 北京 100871) ②(中國(guó)科學(xué)院電子學(xué)研究所傳感器技術(shù)國(guó)家重點(diǎn)實(shí)驗(yàn)室 北京 100190) ③(清華大學(xué)微電子學(xué)研究所 北京 100084)
基金項(xiàng)目:
國(guó)家自然科學(xué)基金項(xiàng)目(61327810, 61201078)，國(guó)家自然科學(xué)基金重大儀器專項(xiàng)(61302032)
A Novel MEMS Chip-based Ground Atmospheric Electric Field Sensor
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1.
(National Key Laboratory of Micro/Nano Fabrication Technology, Peking University, Beijing 100871, China)
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2.
(State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China)
Funds:
The National Natural Science Foundation of China (61327810, 61201078), The National Major Scientific Research Equipment Development of National Natural Science Foundation of China (61302032)
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摘要: 該文基于MEMS電場(chǎng)敏感芯片，研制出了一種新型的地面大氣電場(chǎng)傳感器，解決了現(xiàn)有場(chǎng)磨式電場(chǎng)儀易磨損、功耗大、故障率高等問題。敏感芯片采用SOIMUMPS加工工藝制備，其芯片面積僅為5.5 mm5.5 mm。該文提出了傳感器敏感芯片的弱信號(hào)檢測(cè)方法，設(shè)計(jì)出了滿足環(huán)境適應(yīng)性的傳感器整體結(jié)構(gòu)方案，并建立了傳感器的靈敏度分析模型。對(duì)電場(chǎng)傳感器進(jìn)行測(cè)試，測(cè)量范圍為-50 kV/m~50 kV/m，總不確定度為0.67%，分辨力達(dá)到10 V/m，功耗僅為0.62 W。外場(chǎng)試驗(yàn)結(jié)果表明，MEMS地面大氣電場(chǎng)傳感器在晴天和雷暴天的電場(chǎng)探測(cè)結(jié)果，與Campbell公司場(chǎng)磨式電場(chǎng)儀探測(cè)結(jié)果都有較好的一致性，說明該傳感器能滿足預(yù)測(cè)雷暴要求，實(shí)現(xiàn)雷電監(jiān)測(cè)和預(yù)警功能。
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關(guān)鍵詞:
- 微機(jī)電系統(tǒng) /
- 電場(chǎng)傳感器 /
- MEMS地面大氣電場(chǎng)傳感器
Abstract: In this paper, a novel ground atmospheric electric field sensor based on MEMS electric field sensing chip is presented, which resolves the problems of motor wear, high power consumption and failure rate of the conventional electric field mill. The chip is fabricated in a commercial SOIMUMPS process, and the area of this chip is only 5.5 mm5.5 mm. A weak signal detection method for the chip is proposed. The sensor overall structure scheme is designed, and the sensitivity model is established. The minimum detectable electric field of the sensor is 10 V/m with an uncertainty of 0.67% in the range of -50 kV/m～50 kV/m, and its power consumption is only 0.62 W. The outdoor test shows that the plotted data of the sensor agrees well with those of USA Campbell field mill on both sunny days and thunderstorm days, which indicates that the developed sensor can meet the requirement of lighting monitoring and early warning. -
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