電子束聚焦偏轉(zhuǎn)系統(tǒng)中透鏡加工誤差效應(yīng)的數(shù)值計(jì)算
NUMERICAL COMPUTATION OF PROCESSING ERROR EFFECT OF LENSES IN ELECTRON BEAM FOCUSING AND DEFLECTION SYSTEMS
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摘要: 本文討論了由于電磁透鏡中電極和極靴加工的誤差(孔徑橢圓度和端面傾斜)造成電子束系統(tǒng)電子光學(xué)性質(zhì)影響的數(shù)值計(jì)算問(wèn)題,包括用有限元法計(jì)算具有孔徑橢圓度和端面傾斜的透鏡中電磁場(chǎng)的分布,電子軌跡方程和像差積分式等。最后給出了用所編制的計(jì)算機(jī)程序計(jì)算的若干個(gè)加工誤差效應(yīng)的實(shí)例。Abstract: The numerical computation of processing error effect of lenses (i.e., the ellipticity and tilt of electrodes/pole-pieces in electron beam focusing and deflection systems) and its evaluation are discussed. First, the computation of the potential distributions of lenses with elliptical holes of tilt surfaces on electrodes/pole-pieces using the finite element method is described. Then, the formulae for evaluating the changes of the optical properties caused by the processing errors (i.e., the additional image shifting and additional aberrations) are derived. Finally, some illustrative examples of processing error effect evaluated by the computer programs developed are shown as the spot-diagrams.
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朱協(xié)卿,劉浩寧,電子科學(xué)學(xué)刊,12(1989)4,402-414.[2]西門(mén)紀(jì)業(yè),電子和離子光學(xué)原理及像差導(dǎo)論,科學(xué)出版社,北京,p. 56.[3]E. Munro, Ph. D thesis, University of Cambridge, 1972, p. 123.[4]E. Munro, H. C. Chu, Optik,60(1982) 4, 371.[5]E. Munro. H. C. Chu, Optik,61 (1982)1,1.[6]H. C. Chu. E. Munro, Optik, 61(1982)2, 121. -
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