楔形偏轉(zhuǎn)線圈和平板電極靜電偏轉(zhuǎn)器的偏轉(zhuǎn)場的計算方法
THE NUMERICAL COMPUTATION OF DEFLECTION FIELD OF THE DEFLECTION YOKE WITH WEDGE PROFILE AND THE ELECTROSTATIC DEFLECTOR WITH PLANAR ELECTRODES
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摘要: 本文介紹楔形截面的偏轉(zhuǎn)線圈和平板電極的靜電偏轉(zhuǎn)器的偏轉(zhuǎn)場的計算方法。楔形線圈可以組合成形狀多樣的組合磁偏轉(zhuǎn)器,有利于通過適當(dāng)改變場分布形狀,進一步減小偏轉(zhuǎn)象差。矩形平板電極靜電偏轉(zhuǎn)器的優(yōu)點是結(jié)構(gòu)簡單,有希望用它組成多電子束系統(tǒng)的偏轉(zhuǎn)器陣列。根據(jù)上述兩種偏轉(zhuǎn)器的計算方法,已建立起實用的計算機程序,計算了一些典型結(jié)構(gòu)偏轉(zhuǎn)器的場分布。
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關(guān)鍵詞:
Abstract: This paper describes the computation methods of the deflection field of the deflection yoke with wedge profile and the electrostatic deflector with planar electrodes. The wedge yokes can be combined into various magnetic deflectors, which would offer a variety of choices for more effectively reducing the deflection aberrations by properly adjusting the deflection. field distribution. An advantage of the planar electrostatic deflector is its simplicity in structure. Thus it is probable that a deflector array for the multiple electron beam systems can be composed by the use of this kind of deflector. Based on the described methods in this paper, two practical computation programs have been worked out and, as examples, the field distributions of some typical deflectors have been computed. -
H. C. Chu and E. Munro, Proceeding of Microcircuit Engineering 80, edited by R. P. Kramer, Delft University, Amsterdam 1981, p. 19. [2] E. Munro and H. C. Chu, OPTIK, 60(1982), 371.[2]H. Ohiwa, E. Goto and A. Ono, Elect. Comm. Jpn, .54-B(1971), 44.[3]E. Goto and T. Soma, OPTIK, 48(1977), 255. -
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