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薄柵SiO2擊穿特性的實(shí)驗(yàn)分析和機(jī)理研究

劉紅俠 郝躍

劉紅俠, 郝躍. 薄柵SiO2擊穿特性的實(shí)驗(yàn)分析和機(jī)理研究[J]. 電子與信息學(xué)報, 2001, 23(11): 1211-1215.
引用本文: 劉紅俠, 郝躍. 薄柵SiO2擊穿特性的實(shí)驗(yàn)分析和機(jī)理研究[J]. 電子與信息學(xué)報, 2001, 23(11): 1211-1215.
Liu Hongxia, Hao Yue . EXPERIMENT ANALYSIS AND MECHANISM RESEARCH ON BREAKDOWN CHARACTERISTICS OF THIN SiO2 GATE DIELECTRIC[J]. Journal of Electronics & Information Technology, 2001, 23(11): 1211-1215.
Citation: Liu Hongxia, Hao Yue . EXPERIMENT ANALYSIS AND MECHANISM RESEARCH ON BREAKDOWN CHARACTERISTICS OF THIN SiO2 GATE DIELECTRIC[J]. Journal of Electronics & Information Technology, 2001, 23(11): 1211-1215.

薄柵SiO2擊穿特性的實(shí)驗(yàn)分析和機(jī)理研究

EXPERIMENT ANALYSIS AND MECHANISM RESEARCH ON BREAKDOWN CHARACTERISTICS OF THIN SiO2 GATE DIELECTRIC

  • 摘要: 該文利用襯底熱空穴(SHH)注入技術(shù)分別控制注入到薄柵氧化層中的熱電子和熱空穴的數(shù)量,定量研究了熱電子和熱空穴注入對薄柵氧化層擊穿的影響,提出了薄柵氧化層的經(jīng)時擊穿是由熱電子和熱空穴共同作用導(dǎo)致的新觀點(diǎn),并為薄柵氧化層的經(jīng)時擊穿建立了一個新的物理模型。
  • D.J. Dumin, A nodel realiating wearout to breakdown in thin oxides, IEEE Trans. on Electron Devices, 1994, ED-41(9), 1570-1580.[2]P.P. Apte, Correlation of trap generation to charge-to-breakdown (Qbd), A lhysical-damage lnodel of dielectric breakdown, IEEE Trans. on Electron Devices, 1994, ED-41(9), 1595 1602.[3]I.C. Chen, C. Hu, Electric breakdown in thin gate and tumeling oxide, IEEE Trans. on Electron.Devices, 1985, ED-32(2), 413-422.[4]C.F. Chen, C. Y. Wu, A characterization model for constant current stressed voltage time characteristics of thin thermal oxide grown on silicon substrate, J. Appl. Phys., 1986, 60(11).3926-3944.[5]C.F. Chen, C. Y. Wu, The dielectric reliability of intrinsic thin SiO2 films thermally grown on aheavily doped Si substrate characterization and model, IEEE Trans. on Electron Devices, 1987.ED-34(7), 1540-1;51.[6]B. Ricco, Novel nechanism for tunning and breakdown of thin SiO2 filns, Phy. Rev. Lett., 1983.51(19), 1795-1798.[7]J.C. Lee, I. C. Chen, C. Hu, Model and characterization of gate oxide reliability, IEEE Trans.on Electron Devices, 1988, ED-35(12), 2268-2278.
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出版歷程
  • 收稿日期:  1999-09-22
  • 修回日期:  2000-05-30
  • 刊出日期:  2001-11-19

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