聚焦電子束離子束用的低球差塞普帖靜電透鏡的特性
THE PHYSICAL CHARACTERISTICS OF A SMALL SPHERICAL ABERRATION SEPTIER S ELECTROSTATIC LENS FOR ELECTRON OR ION BEAM FOCUSING
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摘要: 塞普帖透鏡作為低球差靜電透鏡,經(jīng)實(shí)踐證明是一種比較理想的結(jié)構(gòu)。本文提供的在不同幾何尺寸和電極電壓下的計(jì)算結(jié)果,可供不同場(chǎng)合下選擇使用的依據(jù)。
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關(guān)鍵詞:
Abstract: As a small spherical aberration eleetrostatic lens Septier s lens has been proved to be an almost ideal structure by a number of experiments. This paper provides a meth-od of calculating all the physical characteristics of Septier s electrostatic lens. It also provides the calculated results at various geometrie sizes and voltages; they are useful for making correct choice under different conditions. -
屠幸善、敖超、蔡金榮,光電技術(shù),1980年,2/3期,第138頁(yè).[4]LT-1離子探針,中國(guó)科學(xué)儀器廠鑒定材料,1978.[5]黃藍(lán)友,科學(xué)儀器資料匯編I,中國(guó)科學(xué)儀器廠,1977年,第51頁(yè).[6]R. Seeliger, Optik, 4(1948), 258.[7]K. J. Hanszen, Z. Naturf., 13a(1958), 409. -
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