硅納米線的固-液-固熱生長(zhǎng)及升溫特性研究
Heating process of solid-liquid-solid (SLS) growth of silicon nanowires
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摘要: 該文報(bào)道一種直接在硅片上熱生長(zhǎng)硅納米線的新方法。與傳統(tǒng)的VLS生長(zhǎng)機(jī)制不同,該方法在生長(zhǎng)硅納米線的過(guò)程中沒(méi)有引入任何氣態(tài)或液態(tài)硅源.是一種全新的固液固(SLS)生長(zhǎng)機(jī)制。實(shí)驗(yàn)中使用了Ni,Au等金屬作為催化劑,由Ar,H2等作為載流氣體.系統(tǒng)壓強(qiáng)為2.5104Pa,生長(zhǎng)溫度為950-1000℃.生長(zhǎng)出的硅納米線表面光滑,呈純非晶態(tài),直徑為10-40 nm,長(zhǎng)度可達(dá)數(shù)十微米,升溫特性對(duì)硅納米線SLS熱生長(zhǎng)起重要作用。研究了各項(xiàng)實(shí)驗(yàn)參數(shù)(包括氣氛壓強(qiáng),加熱溫度及加熱時(shí)間等)對(duì)硅納米線生長(zhǎng)的影響。
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關(guān)鍵詞:
- 硅納米線; SLS生長(zhǎng)機(jī)制; 升溫特性
Abstract: Large-scale amorphous Si nanowires are prepared by heating the Si substrate at 950-1000C under the ambient of Ar/H2 (2.5104Pa) using Ni (or Au) catalyst. The nanowires have a length up to several tens micron and a diameter of 10-40 nm. A solid-liquid-solid (SLS) mechanism is found controlling the nanowire growth. The heating process during SLS growth is studied detailedly using SEM and TEM. Effects of several processing variables such as the pressure, temperature and heating time are investigated individually. The effect of three heating steps is also discussed. -
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