微波放電等離子體源的研究
RESEARCH ON MICROWAVE PLASMA SOURCE
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摘要: 利用電子迴旋共振(ECR)的原理,在10-310-1Pa的低壓強下,已成功地產(chǎn)生了高活性,高密度的微波等離子體。運用靜電探針裝置,研究了N2、Ar放電中微波功率、氣體壓強對等離子體參量的影響,并對放電等離子體進行了質(zhì)譜分析。
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關(guān)鍵詞:
Abstract: Using the priciple of electron cyclotron resonance, the microwave plasma with high degree of ionization and activity is obtained under the lower pressure from 10-3 to 10-4 Pa. In this paper, the influences of the microwave input power and gas pressures on the parameters of plasma in nitrogen and argon are studied with Langmuir probe, and mass spectrographic analysis is also made. -
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