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摻氮對(duì)類金剛石薄膜場(chǎng)發(fā)射的影響

馬會(huì)中,  張?zhí)m,  姚寧,  李運(yùn)均,  畢兆琪,  王小平,  張兵臨,  胡歡陵

馬會(huì)中, 張?zhí)m, 姚寧, 李運(yùn)均, 畢兆琪, 王小平, 張兵臨, 胡歡陵. 摻氮對(duì)類金剛石薄膜場(chǎng)發(fā)射的影響[J]. 電子與信息學(xué)報(bào), 2001, 23(11): 1246-1248.
引用本文: 馬會(huì)中, 張?zhí)m, 姚寧, 李運(yùn)均, 畢兆琪, 王小平, 張兵臨, 胡歡陵. 摻氮對(duì)類金剛石薄膜場(chǎng)發(fā)射的影響[J]. 電子與信息學(xué)報(bào), 2001, 23(11): 1246-1248.
Ma Huizhong, Zhang Lan, Yao Ning, Bi Zhaoqi, Wang Xiaoping, Li Yunjun, Zhang Binglin, Hu Huanling. THE EFFECT OF NITROGEN ADDITION ON FIELD EMISSION OF DIAMOND-LIKE CARBON FILMS[J]. Journal of Electronics & Information Technology, 2001, 23(11): 1246-1248.
Citation: Ma Huizhong, Zhang Lan, Yao Ning, Bi Zhaoqi, Wang Xiaoping, Li Yunjun, Zhang Binglin, Hu Huanling. THE EFFECT OF NITROGEN ADDITION ON FIELD EMISSION OF DIAMOND-LIKE CARBON FILMS[J]. Journal of Electronics & Information Technology, 2001, 23(11): 1246-1248.

摻氮對(duì)類金剛石薄膜場(chǎng)發(fā)射的影響

THE EFFECT OF NITROGEN ADDITION ON FIELD EMISSION OF DIAMOND-LIKE CARBON FILMS

  • 摘要: 利用脈沖激光沉積技術(shù)制備出了摻氮和未摻氮的類金剛石薄膜。采用X射線衍射儀、喇曼光譜儀、掃描電鏡觀察了摻氮和未摻氮類金剛石薄膜的微結(jié)構(gòu)和表面形貌。場(chǎng)發(fā)射實(shí)驗(yàn)表明,摻氮降低了類金剛石薄膜的閾值電場(chǎng),提高了發(fā)射電流密度。
    Abstract: The Diamond-Like Carbon (DLC) film and Nitrogen-doped DLC(N-DLC) film are deposited on molybdenum coated ceramic substrate by using the pulsed laser deposition technique. The microstructure and morphology of the films are examined using X-ray diffraction, Raman spectroscopy and scanning electron microscopy. Field emission measurements are carried out by using the diode structure. The field emission measurements indicate that nitrogen doping can lower the turn-on field and increase the current density.
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  • Z. Feng, I. G. Brown, J. W. Auger, Electron emission from chemical vapor deposited diamondand amorphous carbon films observed with a simple field emission device, J. Mater. Res, 1995,10(7), 1585-1588.[2]F.Y. Chuang, C. Y. Sun, et al., Local electron field emission characteristics of pulsed laserdeposited diamondlike carbon films, Appl. Phys. Left., 1996, 69(23), 3504-3506.[3]Young Kyu Hong.[J].Ju-Jin Kim, et al., Field electron emission of diamond-like-carbon films de-posited by a laser ablation method, Techanical Digest of IVCM97, Korea.1997,:-[4]G.A.J. Amaratunga, S. R. P. Silva, Nitrogen containing hydrogenated amorphous carbon forthin-film field emission cathodes, Appl. Phys. Lett., 68(18), 1996, 2529-2531.[5]J. Chen, A. X. Wei, et al., Study of field electron emission phenomena associated with n-dopedamorphous diamond films, Journal of Vacuum Science and Technology, B16(2), 1998, 697-699.
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出版歷程
  • 收稿日期:  1999-07-26
  • 修回日期:  1999-08-13
  • 刊出日期:  2001-11-19

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