高靈敏度非晶硅靶攝象管的研制
THE DEVELOPMENT OF a-Si:H IMAGE PICKUP TUBES WITH HIGH PHOTOSENSITIVITY
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摘要: 用大型低頻輝光放電系統(tǒng)制造和研究了具有阻擋結(jié)構(gòu)的非晶硅視象管靶,測量了靶面伏安特性和靶壓對光譜響應(yīng)的影響。制成了2/3英寸和1英寸兩種實驗樣管,白光靈敏度高達2400A/lm。光譜靈敏度在整個可見光范圍都較高,峰值光電導(dǎo)增益在0.58m附近接近0.8。信號電流隨照度線性增加,值約為0.95。在工作電壓下暗電流約為1-3nA。1英寸管的極限分辨率為800TVL,2/3英寸管的為700TVL。衰減惰性稍大,尚須改進。本文還討論了此管的應(yīng)用和某些尚待解決的問題。
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關(guān)鍵詞:
- 攝象管; 非晶硅; 視象管靶
Abstract: a-Si:H vidicon targets based on the blocking structure have been deposited and investigated. The target current-voltage characteristics in dark and under illumination are measured. The photosensitivity is 2400 uA/lm. The spectral sensitivity is high over the whole visible range. The peak photoconductive gain is close to 0.8 at around 5800 A wavelength. The signal current increases linearly with light intensity, r is about 0.95. The dark current is about 1-3 nA at operating target voltage. The limiting resol... -
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