多極靜電偏轉(zhuǎn)器獲得均勻偏轉(zhuǎn)場的方法
MULTIPOLE ELECTROSTATIC DEFLECTORS FOR OBTAINING UNIFORM DEFLECTION FIELD
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摘要: 本文推導(dǎo)了兩種類型的多極靜電偏轉(zhuǎn)器在無窮長情況下場分布的普遍解;提供了多極靜電偏轉(zhuǎn)器在光軸附近獲得均勻偏轉(zhuǎn)場的方法;計算了六種實用的多極靜偏器,給出了有關(guān)公式和數(shù)據(jù),分析了兩種多極靜偏器之間的聯(lián)系和區(qū)別。
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關(guān)鍵詞:
Abstract: The general field solutions are obtained for two kinds of infinitely long multipole electrostatic deflectors. A method is Riven to obtain uniform deflection field near optical axis. Having calculated six forms of the deflectors, the concerned formulas and data are given. The relationship and difference between ihe two kinds of deflectors are analysed. -
E. Goto, et al., J. Vac. Sci. Technol., B1(1983), 1289.[2]T. Hosokawa, et al., ibid., B1(1983), 1293.[3]M. Idesawa, et al., ibid., B1(1983), 1322.[4]J. C. Eidson, et al., ibid., 19(1981), 932.[5]S. Moriya, et al., ibid., B1(1983), 990.[6]G. Owen, et al., ibid., 19(1981), 1064.[7]R. G. E. Hutter, In advances in Image Pickup and Display, Vol. 1, p. 202, Edited by B. Kazan, 1974. -
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