非晶硅薄膜的應(yīng)用前景
PROSPECTS FOR APPLICATION OF a-Si:H FILMS
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摘要: 本文評述并探討了-Si:H薄膜在電子學(xué)領(lǐng)域的種種應(yīng)用。-Si:H太陽電池是非晶硅薄膜的最重要的器件,目前的主要研究課題仍是改進(jìn)材料性質(zhì)和器件參數(shù),以提高電池的能量轉(zhuǎn)換效率。利用-Si:H靈敏的光敏效應(yīng)記錄圖象信息,可能有廣闊的應(yīng)用前景(如用于攝象管和靜電復(fù)印等)。以-Si:H場效應(yīng)管為基礎(chǔ)的集成電路,易于實現(xiàn)大面積和結(jié)構(gòu)的立體化,因此有很大吸引力。-Si:H FET驅(qū)動的液晶大面積顯示和材料本身的場致發(fā)光在大面積平面顯示中直接應(yīng)用的可能性亦引人注目。以整流、檢測等為目的的其它-Si:H二極管也都具有相當(dāng)?shù)膬r值。
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關(guān)鍵詞:
Abstract: The various applications of a-Si:H films are discussed in this paper.a-Si:H solar cells are the most important devices of amorphous silicon, and the major subject at present, is to improve the device parameters, especially to increase the conver-sion efficiency. The prospect may be bright for its photosensitive effects to record and store picture informations on a-Si:H films (e.g. image pick-up tube and electrophotography). The a-Si:H integrated circuits may have attractions for the easier realization of its three-dimensional structure and large area. The large area display of LC driven by a-Si:H FETs and the probability of using electroluminecence of a-Si:H for the same purpose merits attention. Other a-Si:H diodes, such as a-Si:H rectifier and detector, are also quite valuable. -
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