W[111]尖端場發(fā)射電子槍的工作特性
OPERATING CHARACTERISTICS FOR A FIELD EMISSION GUN WITH W[111] TIP
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摘要: 本文報(bào)道了單晶W[111]尖端的制作,以及由W[111]尖端陰極,第一、二陽極組成的三極場發(fā)射電子槍(FEG)的工作特性。實(shí)驗(yàn)結(jié)果表明,這種FEG在槍室真空為510-7Pa,加速電壓在30kV的條件下,其虛源半徑為1.6nm;亮度為3.8109A/cm2.sterad;場發(fā)射電流為1A時(shí),束流穩(wěn)定性為5%(10min內(nèi))。說明它是一種較理想的點(diǎn)狀電子源,在實(shí)際應(yīng)用中具有廣泛發(fā)展前景。
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關(guān)鍵詞:
- 場發(fā)射電子槍; W[111]尖端; 虛源半徑; 亮度; 束流穩(wěn)定性
Abstract: The fabrication method of W[111] tip and the operating characteristics ofa field emission gun (PEG) which consists of W[111] tip, first and second anodes are reported. Experimental results show that on condition that the vacuum in the gun chamber is better than 510-7 Pa and acceleration voltage is 30kV, the finite radius of the virtual source of the FEG is 1.6nm, and the brightness of FEG is estimated as 3.8109 A/cm2, sterad; on condition that the field emission current is 1A, the stability of beam current is better than 5% in 10 min. It is able to be used in scanning electron microscopesand electron probe system etc. -
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