-Fe2O3薄膜的制備、結(jié)構(gòu)和氣敏特性
PREPARATION,STRUCTURE AND GAS SENSING PROPERTIES OF Fe2O3 THIN FILMS
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摘要: 采用等離子增強(qiáng)化學(xué)氣相淀積工藝(PECVD)制備出了Fe2O3薄膜。用X射線衍射(XRD)和掃描電子顯微鏡(SEM)分析了薄膜的結(jié)構(gòu)、表面形貌和粒度。研究了薄膜對(duì)乙醇、液化石油氣、煤氣和氫氣的敏感特性。結(jié)果表明所研制的薄膜對(duì)乙醇有較高靈敏度,其檢測(cè)下限可達(dá)1ppm,而對(duì)液化石油氣、煤氣和氫氣不太敏感,具有優(yōu)良的選擇性。
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關(guān)鍵詞:
- -Fe2O3薄膜; 氣敏特性; 氣敏元件
Abstract: A method to deposit hematite (Fe2O3) thin films by plasma-enhanced chemical vapor deposition (PECVD) is introduced. The structure and particle-size of Fe2O5 thin film are analysed by X-ray diffraction and SEM, respectively. The gas sensitive properties of thin film to LPG, coal gas, hydrogen and ethanol are studied. The results show that films prepared in this way are highly sensitive to ethanol. However, it is not so sensitive to LPG, coal gas or hydrogen. Therefore the film is proved to have high selectivity. -
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