一種新的閉式空域格林函數(shù)及其在三維互連結(jié)構(gòu)電容參數(shù)提取中的應(yīng)用
A NEW TYPE OF CLOSED-FORM SPATIAL GREEN s FUNCTION AND ITS APPLICATION TO THE CAPACITANCE EXTRACTION OF THE 3-D INTERCONNECTS
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摘要: 該文提出了一種提取分層介質(zhì)中三維靜態(tài)閉式空域格林函數(shù)的通用算法,并成功地運(yùn)用于三維多層多導(dǎo)體互連結(jié)構(gòu)的電容參數(shù)提取。該算法在譜域等效傳輸線模型的基礎(chǔ)上,應(yīng)用Krylov子空間維數(shù)縮減技術(shù)求出譜域格林函數(shù)的有理逼近表達(dá)式,再由留數(shù)定理得到閉式空域格林函數(shù)。所得閉式空域格林函數(shù)結(jié)合矩量法可以方便地用于提取三維互連結(jié)構(gòu)的電容參數(shù)。數(shù)值結(jié)果驗(yàn)證了方法的準(zhǔn)確性和有效性。
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關(guān)鍵詞:
- 格林函數(shù); 電容參數(shù)提取; 矩量法; 有理逼近
Abstract: A general and efficient technique is presented for deriving the closed-form spatial Green s functions of 3-D Poisson equations in multilayered media. Based on the spectral-domain equivalent transmission line model of the layered Green s function, an efficient Krylov subs pace order-reduction technique is used to get, the rational approximation of the Green s function in the spectral-domain, then the spatial-domain Green s function is acquired directly via the residual theorem. The derived Green s function c... -
Ji Zheng, Zhengfam Li, Efficient parameter computation of2-D multiconductor interconnection lines in layered media by convergence acceleration of dielectric Greerrs function via Pade approx imation,IEEE Trans. on MTT, 998, 46(10), 1339-13-43.[2]C. Wei, R. F. Harrington, J. R. Mautz, T. K. Sarkar. Mnlticonductor transmission lines in multilayered dielectric media, IEEE Trans. on MTT, 1984. 32(4), 439-449.[3]Mustafa Celik.[J].A. C. Cangellaris, Simulation of dispersive multiconductor transmission lines by Padl approximation via the Lanczos process, IEEE Trans. on CAD.1997,:-[4]T. ltoh, Spectral domain immit tance approach for dispersion characteristics of shielded inicrostrips with tuning septums, Proc. of 9th European Microwave Conf., Brighton, England.Sept. 17-21, 1979. -
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