采用懸掛金屬掩模制作約瑟夫遜隧道結
FABRICATION OF JOSEPHSON TUNNEL JUNCTION WITH SUSPENDED METAL MASK
-
摘要: 正 1.引言 近幾年來由于約瑟夫遜隧道結在許多方面得到應用,特別是在新一代超級電子計算機上得到了應用,所以人們對制作小面積隧道結的技術產(chǎn)生了濃厚的興趣。制作軟金屬超導隧道結,以IBM為代表已形成一套完整的工藝。但要用他們的辦法重復地制作出實用的隧道結,必須有高級的專用設備和豐富的技術積累。一般單位在短期內是難以達到這樣的技術水平的。1982年Gundlach(西德馬克斯-普朗克學會)發(fā)表的文章仍在使用刀片制作的金屬掩模。我們也曾經(jīng)使用過這種掩模,但是用一般形式的金屬掩模制作隧道結時,在氧化層勢壘形成以后,必須打開鍍膜機的鐘罩,以便轉換掩模制作上電極。這樣氧化層勢壘就容易受到大氣污染。 為了克服這一缺點,我們用刀片拼裝成的懸掛金屬掩模來制作隧道結。這一技術具
-
關鍵詞:
Abstract: A small area Josephson tunnel junction is fabricated with suspended metai mask which is made from ordinary razor blades. The junction overlap is formed by two succeeding evaporations of susperconductor materials at oblique angles. The advantages of this technique are that the fabrieation processes ean be performed continuously without opening the evaperation chamber and also it is suitable for making a small area tunnel junction. The I-V charaeteristic of a tunnel junction made by this technique has been taken at 4.2K. -
J. H. Greiner et al., IBM J. Res. Develop., 24(1980), 195.[2]K. H. Gundlach et al., Appl. Phys. Lett., 41(1982), 294.[3]楊彩炳等,Pb-In合金sIs結的初步研究,第三次超導隧道效應全國學術會議,1982.[4]G. M. Daalmans, Proc. of Second international Conference on Superconducting Quantum Interference Devices and their Applications, Berlin(West); May 6-9, 1980, p. 399, ed. by H.D. Hahlbohm and H. Lbbig.[5]J. T. C. Yeh, J.Appl. Phys. 45(1974 ), 4617.[6]G. J. Dolan, Appl. Phys. Lett., 31(1977 ), 337. -
計量
- 文章訪問數(shù): 1908
- HTML全文瀏覽量: 96
- PDF下載量: 309
- 被引次數(shù): 0
下載:
