分子束外延生長(zhǎng)的GaAs-AlxGa1-xAs多層異質(zhì)結(jié)構(gòu)中的精細(xì)低維調(diào)制條紋的觀察
OBSERVATION OF FINE LOW DIMENSIONAL MODULATED FRINGES IN GaAs/AlxGa1-xAs MULTILAYER HETEROSTRUCTURES GROWN BY MBI
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摘要: 應(yīng)用透射式電子顯微鏡觀察了GaAs-AlxGa1-xAs多層異質(zhì)結(jié)結(jié)構(gòu)中的精細(xì)低維調(diào)制條紋。在鄰近GaAs-AlxGa1-xAs超晶格層的緩沖層中和與這緩沖層鄰近的GaAs-AlxGa1-xAs超晶格層的小區(qū)域中發(fā)現(xiàn)了等寬度的精細(xì)低維調(diào)制條紋,其寬度為9.1的GaAs條紋,12的AlxGa1-xAs條紋。文中介紹了用顯微密度計(jì)獲得的這些條紋的密度分布結(jié)果。同時(shí)還給出了GaAs-AlxGa1-xAs 多層異質(zhì)結(jié)結(jié)構(gòu)的晶格像和用X射線能量散射譜技術(shù)獲得的成分定量分析結(jié)果。Abstract: Fine low dimensional modulated fringes (FLDMF) by named in GaAs/ AlxGa1-xAs multilayer heterostructures using transmission electron microscopy (TEM) have been observed. Philips EM400ST and JEOL EM4000EX were used in this work. The FLDMF with equal width were discovered within the buffer layer and also within the two adjacent superlattice layers of GaAs/AlGaAs The width with 9.1 is GaAs fringes, 12 is AlGaAs fringes. Some results from the density analysis of the fringes using microdensitometer are presented. Otherwise lattice image of GaAs/AlxGa1-xAs multilayer heterostructures and analytic results of composition in GaAs/AlxGa1-xAs multilayer heterostructures by using the techniques of energy dispersive X-ray analysis (EDX) have been given.
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